Applications of tantalum targets in the field of microelectronics

Tantalum targets are widely used as substrates for electrolytic capacitors because of their protective properties due to their ability to form oxide films. This paper introduces the application of tantalum sputtering target in the field of microelectronics.

Tantalum targets for thermal inkjet print head applications

Thermojet printing heads can be used in the manufacture of thin-film integrated circuits, which is advantageous for the use of tantalum targets. In the fabrication of integrated circuits, thin-film resistors are used to rapidly heat the film of the ink at an energy density of nearly 1.28E9 watts/m 2, causing some of the very small ink to evaporate to form extended bubbles, which are in effect tiny droplets of ink. Since high temperature inks can cause cavitation in some inkjet printing equipment, tantalum antiaircraft film can be used to protect ink facilities.

Tantalum target for copper plating

Tantalum film has obvious advantages in the manufacturing process of integrated circuits. Copper plating is one of the major advances in the use of tantalum sputtering targets. Photoresist masks and plasma etching techniques cannot be used to form copper, which does not form the required volatile components under low temperature plasma etching conditions. Due to the high conductivity of copper, the barrier film must be able to completely isolate the copper. However, if the barrier film is too thick, the high conductivity advantage of copper interconnection will be lost. It is therefore important that the deposition of the barrier film in the copper plating scheme has a good stepped coverage and that there are fewer bumps in the channel/groove voids. Tantalum and nitric oxide PVD barrier films show some unique advantages in replacing 0.10um copper IC circuits, such as good copper diffusivity and good adhesion to electrolyte and copper.

Tantalum targets mentioned above are used in thermal inkjet printing heads and copper plating. Tantalum is a potential material in the microelectronics industry, and these are just some of the applications of tantalum sputtering targets. If you are interested in this topic, please contact our sales at sales@ti-metals.com